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A STUDY OF SCHEMATIC DIAGRAM OF SEM INSTRUMENT
Deepanshi Khatri Dr. Vipin Kumar
Abstract:
Scanning electron microscopy (SEM) is a powerful technique for investigating the morphology and microstructure of materials. It has become an essential tool for researchers in various fields, including materials science, biology, and nanotechnology. In this paper, we provide a detailed study of the schematic diagram of an SEM instrument. We describe the various components of an SEM instrument and their functions, including the electron source, electron column, sample chamber, electron detectors, and imaging system. We also discuss the different modes of operation of an SEM, such as imaging, electron backscatter diffraction (EBSD), energy dispersive X-ray spectroscopy (EDS), and focused ion beam (FIB) milling. Finally, we present some of the latest developments in SEM technology, such as aberration correction, low-voltage imaging, and environmental SEM